发明授权
US06352621B1 Method of manufacturing film laminate having exchange anisotropic magnetic field 有权
具有交换各向异性磁场的膜层叠体的制造方法

  • 专利标题: Method of manufacturing film laminate having exchange anisotropic magnetic field
  • 专利标题(中): 具有交换各向异性磁场的膜层叠体的制造方法
  • 申请号: US09640971
    申请日: 2000-08-17
  • 公开(公告)号: US06352621B1
    公开(公告)日: 2002-03-05
  • 发明人: Masamichi SaitoToshinori Watanabe
  • 申请人: Masamichi SaitoToshinori Watanabe
  • 优先权: JP8-242043 19960912; JP8-334142 19961213
  • 主分类号: C23C1435
  • IPC分类号: C23C1435
Method of manufacturing film laminate having exchange anisotropic magnetic field
摘要:
PtMn films are used as antiferromagnetic layers of a dual spin-valve type magnetoresistive sensor. An exchange anisotropic magnetic field is achieved regardless of whether the PtMn film is formed over or under the pinned magnetic layer. Also, an effective exchange anisotropic magnetic field is produced even with heat treatment at a relatively low temperature. Alternatively, a PtMn film is used as an antiferromagnetic layer of a spin-valve film laminate. The use of a PtMn film enables a sufficient exchange anisotropic magnetic field to be produced even with a relatively low heat treatment temperature and a relatively small film thickness. Therefore, the number of total layers of the spin-valve film laminate can be increased to increase a magnetoresistance ratio, and a total thickness of the spin-valve film laminate can be made relatively small.
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