发明授权
US06358768B1 Method for fabricating a solid-state image sensor having an HCCD and VCCDs
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制造具有HCCD和VCCD的固态图像传感器的方法
- 专利标题: Method for fabricating a solid-state image sensor having an HCCD and VCCDs
- 专利标题(中): 制造具有HCCD和VCCD的固态图像传感器的方法
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申请号: US09466190申请日: 1999-12-17
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公开(公告)号: US06358768B1公开(公告)日: 2002-03-19
- 发明人: Yong Park , Sang Ho Moon
- 申请人: Yong Park , Sang Ho Moon
- 优先权: KR97/23348 19970605
- 主分类号: H01L2100
- IPC分类号: H01L2100
摘要:
A solid-state image sensor and a fabricating method thereof in which poly gates in a horizontal charge coupled device (hereinafter referred to as HCCD) are made to have different lengths to omit a barrier ion implanting process step, thus simplifying the entire process and maximizing the charge-transferring efficiency are disclosed, the solid-state image sensor having an HCCD and VCCDs including a well region of a second conductivity type formed in a semiconductor substrate of a first conductivity type; a HCCD of the first conductivity type formed on the well region of the second conductivity type; and a plurality of polygate electrodes having sequentially different lengths repeatedly formed on the semiconductor substrate.
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