发明授权
US06362032B1 Method for manufacturing fringe field switching mode liquid crystal display 有权
制造边缘场开关模式液晶显示器的方法

  • 专利标题: Method for manufacturing fringe field switching mode liquid crystal display
  • 专利标题(中): 制造边缘场开关模式液晶显示器的方法
  • 申请号: US09559367
    申请日: 2000-04-24
  • 公开(公告)号: US06362032B1
    公开(公告)日: 2002-03-26
  • 发明人: Hyang Yul KimSeung Hee LeeHyung Il Jeon
  • 申请人: Hyang Yul KimSeung Hee LeeHyung Il Jeon
  • 优先权: KR99-14652 19990423
  • 主分类号: H01L2100
  • IPC分类号: H01L2100
Method for manufacturing fringe field switching mode liquid crystal display
摘要:
This invention provides a method for manufacturing a fringe field switching mode liquid crystal display. The method includes the steps of: depositing a transparent metal layer on a transparent insulating layer and forming a counter electrode by etching the transparent metal layer according to a first mask process; depositing an insulating layer on the counter electrode and the substrate; depositing a first opaque metal layer on the insulating layer and forming a gate line, a common electrode line and a pad by etching the first opaque metal layer according to a second mask process; depositing a gate insulating layer, an a-Si layer and an n+ a-Si layer in turn on a resultant and defining an active region of thin film transistor by etching the n+ a-Si layer and the a-Si layer according to a third mask process; depositing a transparent metal layer on the resultant and forming a pixel electrode of a comb shape by etching the transparent metal layer according to a fourth mask process; etching the gate insulating layer according to a fifth mask process so that the pad is exposed; forming a source electrode, a drain electrode and data line including a data pad by etching the second opaque metal layer according to a sixth mask process; and forming a passivation layer on the entire resultant and etching the passivation layer according to a seventh mask process so that the data pad is exposed.
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