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发明授权
US06364995B1 Dome-shaped inductive coupling wall having a plurality of radii for an inductively coupled plasma reactor 有权
具有用于电感耦合等离子体反应器的多个半径的圆顶形感应耦合壁

  • 专利标题： Dome-shaped inductive coupling wall having a plurality of radii for an inductively coupled plasma reactor
  • 专利标题（中）： 具有用于电感耦合等离子体反应器的多个半径的圆顶形感应耦合壁
  • 申请号： US09561262
    申请日： 2000-04-27
  • 公开(公告)号： US06364995B1
    公开(公告)日： 2002-04-02
  • 发明人: Kevin Fairbairn , Romuald Nowak
  • 申请人： Kevin Fairbairn , Romuald Nowak
  • 主分类号： C23F102
  • IPC分类号： C23F102
Dome-shaped inductive coupling wall having a plurality of radii for an inductively coupled plasma reactor
摘要：
A non-conductive dome-shaped portion having a plurality of different radii as a dielectric inductive coupling wall of a reactor chamber. The non-conductive dome-shaped portion having a plurality of different radii being adapted to be positioned in close underlying relationship to a coil antenna and transmissive of RF energy inductively coupled into the chamber from the coil.
摘要（中）：

具有多个不同半径作为反应室的介电感应耦合壁的非导电圆顶形部分。 具有多个不同半径的非导电圆顶形部分适于被定位成与线圈天线紧密关系，并且从线圈感应地耦合到腔室中的RF能量的透射。

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