Invention Grant
US06372284B1 Fluoropolymer coating of lithium niobate integrated optical devices 失效
铌酸锂集成光器件的含氟聚合物涂层

  • Patent Title: Fluoropolymer coating of lithium niobate integrated optical devices
  • Patent Title (中): 铌酸锂集成光器件的含氟聚合物涂层
  • Application No.: US09095694
    Application Date: 1998-06-11
  • Publication No.: US06372284B1
    Publication Date: 2002-04-16
  • Inventor: Larry A. HessWilliam C. Imes
  • Applicant: Larry A. HessWilliam C. Imes
  • Main IPC: B05D512
  • IPC: B05D512
Fluoropolymer coating of lithium niobate integrated optical devices
Abstract:
An integrated optical device is made starting with a substrate of lithium niobate. A fluoropolymer solution is applied to coat at least part of the substrate. The substrate having fluoropolymer coat is prepared such that a metal film will adhere to the fluoropolymer coating. Next, an electrode is created by applying a metal film to the fluoropolymer coat. The preparing step is preferably accomplished by heating the substrate with the fluoropolymer coating on it such that the fluoropolymer coating is annealed, the annealing of the fluoropolymer coating improving the adhesion of the metal film to the fluoropolymer coating. Alternately, the preparing of the substrate having fluoropolymer coating includes, simultaneously with the application of the metal film, cooling the substrate with the fluoropolymer coating by contacting a thermal sink with the substrate with the fluoropolymer coating.
Information query
Patent Agency Ranking
0/0