公开(公告)号：US06925211B2

公开(公告)日：2005-08-02

申请号：US10602833

申请日：2003-06-25

申请人： William K. Burns ,  Larry A. Hess ,  Vishal Agarwal

发明人： William K. Burns ,  Larry A. Hess ,  Vishal Agarwal

IPC分类号： G02F1/035 ,  G02F1/225

CPC分类号： G02F1/035 ,  G02F1/225 ,  G02F2201/07 ,  G02F2203/21

摘要： An optical waveguide device including an electro-optical crystal substrate having a top surface and a bottom surface; an optical waveguide path formed within a surface of the electro-optical crystal substrate; at least one electrode positioned above the optical waveguide path for applying an electric field to the optical waveguide path; and a silicon titanium oxynitride layer and a connecting layer for interconnecting the silicon titanium oxynitride layer to another surface of the electro-optical crystal substrate that is opposite to the surface in which the optical waveguide path is formed.

公开(公告)号：US06372284B1

公开(公告)日：2002-04-16

申请号：US09095694

申请日：1998-06-11

申请人： Larry A. Hess ,  William C. Imes

发明人： Larry A. Hess ,  William C. Imes

IPC分类号： B05D512

CPC分类号： G02F1/035 ,  G02B2006/1204 ,  G02B2006/12169 ,  G02F2201/07

摘要： An integrated optical device is made starting with a substrate of lithium niobate. A fluoropolymer solution is applied to coat at least part of the substrate. The substrate having fluoropolymer coat is prepared such that a metal film will adhere to the fluoropolymer coating. Next, an electrode is created by applying a metal film to the fluoropolymer coat. The preparing step is preferably accomplished by heating the substrate with the fluoropolymer coating on it such that the fluoropolymer coating is annealed, the annealing of the fluoropolymer coating improving the adhesion of the metal film to the fluoropolymer coating. Alternately, the preparing of the substrate having fluoropolymer coating includes, simultaneously with the application of the metal film, cooling the substrate with the fluoropolymer coating by contacting a thermal sink with the substrate with the fluoropolymer coating.

摘要翻译： 由铌酸锂基材开始制成集成光学元件。 施加含氟聚合物溶液以涂覆至少部分基材。 制备具有含氟聚合物涂层的基材，使得金属膜将粘附到含氟聚合物涂层上。 接下来，通过将金属膜施加到含氟聚合物涂层来产生电极。 制备步骤优选通过在其上加热含氟聚合物涂层的基底来实现，使得氟聚合物涂层退火，氟聚合物涂层的退火改善了金属膜与含氟聚合物涂层的粘合性。 或者，制备具有含氟聚合物涂层的基材包括与金属膜一起施加的同时，通过使氟聚合物涂层与基底的热沉接触接触来用含氟聚合物涂层冷却基底。

公开(公告)号：US06661934B2

公开(公告)日：2003-12-09

申请号：US10143885

申请日：2002-05-14

申请人： William K. Burns ,  Larry A. Hess ,  Vishal Agarwal

发明人： William K. Burns ,  Larry A. Hess ,  Vishal Agarwal

IPC分类号： G02F1035

CPC分类号： G02F1/035 ,  G02F1/225 ,  G02F2201/07 ,  G02F2203/21

摘要： An optical waveguide device including an electro-optical crystal substrate having a top surface and a bottom surface; an optical waveguide path formed within a surface of the electro-optical crystal substrate; at least one electrode positioned above the optical waveguide path for applying an electric field to the optical waveguide path; and a silicon titanium oxynitride layer and a connecting layer for interconnecting the silicon titanium oxynitride layer to another surface of the electro-optical crystal substrate that is opposite to the surface in which the optical waveguide path is formed.

公开(公告)号：US06654512B2

公开(公告)日：2003-11-25

申请号：US10035193

申请日：2002-01-04

申请人： Williams K. Burns ,  Larry A. Hess ,  Vishal Agarwal

发明人： Williams K. Burns ,  Larry A. Hess ,  Vishal Agarwal

IPC分类号： G02F1035

CPC分类号： G02F1/035 ,  G02F1/225 ,  G02F2201/07 ,  G02F2203/21

摘要： An optical waveguide device including an electro-optical crystal substrate having a top surface and a bottom surface; an optical waveguide path formed within a surface of the electro-optical crystal substrate; at least one electrode positioned above the optical waveguide path for applying an electric field to the optical waveguide path; and a silicon titanium oxynitride layer and a connecting layer for interconnecting the silicon titanium oxynitride layer to another surface of the electro-optical crystal substrate that is opposite to the surface in which the optical waveguide path is formed.

摘要翻译： 一种光波导器件，包括具有顶表面和底表面的电光晶体基底; 形成在所述电光晶体基板的表面内的光波导路径; 位于所述光波导路径上方的用于向所述光波导路径施加电场的至少一个电极; 以及用于将硅氮氧化钛层与形成有光波导路径的表面相反的电光晶体基板的另一表面互连的连接层。