发明授权
- 专利标题: Method of producing a radiation sensor
- 专利标题(中): 辐射传感器的制造方法
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申请号: US09406272申请日: 1999-09-24
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公开(公告)号: US06372656B1公开(公告)日: 2002-04-16
- 发明人: Franz Laermer , Wilhelm Frey
- 申请人: Franz Laermer , Wilhelm Frey
- 优先权: DE19843984 19980925
- 主分类号: H01L21302
- IPC分类号: H01L21302
摘要:
A method of producing an infrared sensor on a semiconductor substrate involves defining at least one area on the surface of the semiconductor substrate where a recess is to be created in the semiconductor substrate, depositing a membrane on the surface, applying a radiation absorber to the membrane in the defined area, applying thermoelements with a hot contact in thermal contact with the radiation absorber and a cold contact in thermal contact with the semiconductor substrate. In this method, an opening is provided in the membrane in the defined area, and the semiconductor substrate is etched through the opening.
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