发明授权
- 专利标题: Cleaning solution for electronic materials and method for using same
- 专利标题(中): 电子材料清洗液及其使用方法
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申请号: US09215872申请日: 1998-12-18
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公开(公告)号: US06372699B1公开(公告)日: 2002-04-16
- 发明人: Hiroshi Morita , Tetsuo Mizuniwa , Junichi Ida
- 申请人: Hiroshi Morita , Tetsuo Mizuniwa , Junichi Ida
- 优先权: JP9-353403 19971222; JP10-013938 19980127
- 主分类号: C11D1310
- IPC分类号: C11D1310
摘要:
A cleaning solution for electronic materials contains dissolved oxygen gas at a concentration greater than atmospheric saturation concentration, 0.1-10,000 mg/liter of ammonia, and 0.1-10,000 mg/liter of hydrogen peroxide in water. Alternatively, the cleaning solution contains dissolved reducing agents, 0.1-10,000 mg/liter of ammonia, and 0.1-10,000 mg/liter of hydrogen peroxide in water. A method for making the cleaning solution of the present invention is provided. A method for cleaning electronic materials using the cleaning solution of the present invention is also provided.
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