发明授权
US06372699B1 Cleaning solution for electronic materials and method for using same 有权
电子材料清洗液及其使用方法

  • 专利标题: Cleaning solution for electronic materials and method for using same
  • 专利标题(中): 电子材料清洗液及其使用方法
  • 申请号: US09215872
    申请日: 1998-12-18
  • 公开(公告)号: US06372699B1
    公开(公告)日: 2002-04-16
  • 发明人: Hiroshi MoritaTetsuo MizuniwaJunichi Ida
  • 申请人: Hiroshi MoritaTetsuo MizuniwaJunichi Ida
  • 优先权: JP9-353403 19971222; JP10-013938 19980127
  • 主分类号: C11D1310
  • IPC分类号: C11D1310
Cleaning solution for electronic materials and method for using same
摘要:
A cleaning solution for electronic materials contains dissolved oxygen gas at a concentration greater than atmospheric saturation concentration, 0.1-10,000 mg/liter of ammonia, and 0.1-10,000 mg/liter of hydrogen peroxide in water. Alternatively, the cleaning solution contains dissolved reducing agents, 0.1-10,000 mg/liter of ammonia, and 0.1-10,000 mg/liter of hydrogen peroxide in water. A method for making the cleaning solution of the present invention is provided. A method for cleaning electronic materials using the cleaning solution of the present invention is also provided.
信息查询
0/0