发明授权
- 专利标题: Field emission device having a surface passivation layer
- 专利标题(中): 具有表面钝化层的场致发射器件
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申请号: US09459119申请日: 1999-12-10
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公开(公告)号: US06373174B1公开(公告)日: 2002-04-16
- 发明人: Albert Alec Talin , Curtis D. Moyer , Kenneth A. Dean , Jeffrey H. Baker , Steven A. Voight
- 申请人: Albert Alec Talin , Curtis D. Moyer , Kenneth A. Dean , Jeffrey H. Baker , Steven A. Voight
- 主分类号: H01J102
- IPC分类号: H01J102
摘要:
A field emission device (100, 200, 300, 400, 500) includes a substrate (110, 210, 310, 410, 510), a cathode (115, 215, 315, 415, 515) formed thereon, a plurality of electron emitters (170, 270, 370, 470, 570) and a plurality of gate electrodes (150, 250, 350, 450, 550) proximately disposed to the plurality of electron emitters (170, 270, 370, 470, 570) for effecting electron emission therefrom, a dielectric layer (140, 240, 340, 440, 540) having a major surface (143, 243, 343, 443, 543), a surface passivation layer (190, 290, 390, 490, 590) formed on the major surface (143, 243, 343, 443, 543), and an anode (180, 280, 380, 480, 580) spaced from the gate electrodes (250, 350, 450, 550).
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