发明授权
- 专利标题: Micromechanical discrete time and frequency characterization of signals via resonator clamping and motion-arresting mechanisms
- 专利标题(中): 通过谐振器夹紧和运动拦截机制的信号的微机械离散时间和频率表征
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申请号: US09510367申请日: 2000-02-22
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公开(公告)号: US06374677B1公开(公告)日: 2002-04-23
- 发明人: Andrew A. Berlin , Elmer S. Hung , Feng Zhao
- 申请人: Andrew A. Berlin , Elmer S. Hung , Feng Zhao
- 主分类号: G01M700
- IPC分类号: G01M700
摘要:
A micromechanical resonator including a motion arresting mechanism to rapidly damp the vibration of a resonator beginning at any given moment in time to remove vibration caused by previous events. An electrostatic clamp uses a bias voltage between an electrode and the resonator to damp the resonator and return it to its equilibrium position. A mechanical clamp includes an actuator that forces the mechanical clamp to contact the resonator. These micromechanical resonators facilitate condition based monitoring of complex electromechanical machines and components by allowing signature analysis in multiple temporal and frequency domains.
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