发明授权
US06375814B1 Magnetron with parallel race track and modified end portions thereof 失效
具有平行轨道的磁控管及其修改的端部

  • 专利标题: Magnetron with parallel race track and modified end portions thereof
  • 专利标题(中): 具有平行轨道的磁控管及其修改的端部
  • 申请号: US09673176
    申请日: 2001-02-12
  • 公开(公告)号: US06375814B1
    公开(公告)日: 2002-04-23
  • 发明人: Wilmert De BosscherHugo Lievens
  • 申请人: Wilmert De BosscherHugo Lievens
  • 优先权: EP98201208 19980416
  • 主分类号: C23C1434
  • IPC分类号: C23C1434
Magnetron with parallel race track and modified end portions thereof
摘要:
A sputtering magnetron with a rotating cylindrical target and a stationary magnet assembly (22, 24*) is described, the magnet assembly (22, 24*) being adapted to produce an elongate plasma race-track on the surface of the target, the elongate race-track having substantially parallel tracks over a substantial portion of its length and being closed at each end by end portions (22′), wherein the spacing between the tracks of the race-track is increased locally to materially effect sputtering onto a substrate. The increase in spacing may be at the end portions or along the parallel track portion. The increase in spacing may provide more even erosion of the target beneath the end portions of the race-track, and provide more even coatings on the substrate.
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