发明授权
- 专利标题: Methods and structures for protecting reticles from ESD failure
- 专利标题(中): 保护掩模版免受ESD故障的方法和结构
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申请号: US09542127申请日: 2000-04-04
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公开(公告)号: US06376131B1公开(公告)日: 2002-04-23
- 发明人: Jae Cho , Zhi-Min Ling , Xin X. Wu
- 申请人: Jae Cho , Zhi-Min Ling , Xin X. Wu
- 主分类号: G03F900
- IPC分类号: G03F900
摘要:
A reticle that is modified to prevent bridging of the masking material (e.g., chrome) between portions of the lithographic mask pattern during an integrated circuit fabrication process. According to a first aspect, the modification involves electrically connecting the various portions of the lithographic mask pattern that balance charges generated in the portions during fabrication processes. In one embodiment, sub-resolution wires that extend between the lithographic mask pattern portions facilitate electrical conduction between the mask pattern portions, thereby equalizing dissimilar charges. In another embodiment, a transparent conductive film is formed over the lithographic mask pattern to facilitate conduction. In accordance with a second aspect, the modification involves separating the various portions of the lithographic mask pattern into relatively small segments by providing sub-resolution gaps between the various portions, thereby minimizing the amount of charge that is generated on each portion.