发明授权
- 专利标题: Cleaning process and composition using fluorocarbons
- 专利标题(中): 使用碳氟化合物的清洁工艺和成分
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申请号: US09282815申请日: 1999-03-31
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公开(公告)号: US06376452B1公开(公告)日: 2002-04-23
- 发明人: Richard M. Flynn , Mark W. Grenfell , George G. I. Moore , John G. Owens , Dean S. Milbrath
- 申请人: Richard M. Flynn , Mark W. Grenfell , George G. I. Moore , John G. Owens , Dean S. Milbrath
- 主分类号: C11D324
- IPC分类号: C11D324
摘要:
A process for removing contaminants from the surface of a substrate comprises contacting the substrate with a cleaning composition comprising at least one mono-, di-, or trialkoxy-substituted perfluoroalkane, perfluorocycloalkane, perfluorocycloalkyl-containing perfluoroalkane, or perfluorocycloalkylene-containing perfluoroalkane compound, the compound optionally containing additional catenary heteroatoms. The compounds exhibit good solvency properties while being environmentally acceptable.
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