A method is provided for decomposition of chlorofluorocarbon to be decomposed and then disposed of. The process includes the following the steps of. A mixture of liquid chlorofluorocarbon substances to be decomposed (and then disposed of) and a liquid member are heated to a temperature of from about 500° C. to about 700° C. in order to produce a superheated vapor. The liquids member may be water, methanol, hydrogen peroxide, or mixtures thereof. The superheated vapor is maintained in a reactor for a sufficient reacting time in order to achieve decomposition of the chlorofluorocarbon in the mixture before passing through the reactor to a discharge outlet open to the environment.