发明授权
- 专利标题: NAND-type flash memory devices and methods of fabricating the same
- 专利标题(中): NAND型闪存器件及其制造方法
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申请号: US09678917申请日: 2000-10-04
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公开(公告)号: US06376876B1公开(公告)日: 2002-04-23
- 发明人: Kwang-Shik Shin , Kyu-Charn Park , Heung-Kwun Oh , Sung-Hoi Hur
- 申请人: Kwang-Shik Shin , Kyu-Charn Park , Heung-Kwun Oh , Sung-Hoi Hur
- 优先权: KR00-02039 20000117
- 主分类号: H01L2978
- IPC分类号: H01L2978
摘要:
NAND-type flash memory devices and methods of fabricating the same are provided. The NAND-type flash memory device includes a plurality of isolation layers running parallel with each other, which are formed at predetermined regions of a semiconductor substrate. This device also includes a string selection line pattern, a plurality of word line patterns and a ground selection line pattern which cross over the isolation layers and active regions between the isolation layers. Source regions are formed in the active regions adjacent to the ground selection line patterns and opposite the string selection line pattern. The source regions and the isolation layers between the source regions are covered with a common source line running parallel with the ground selection line pattern.
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