发明授权
- 专利标题: Automatic defect classification comparator die selection system
- 专利标题(中): 自动缺陷分类比较器模具选择系统
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申请号: US09294246申请日: 1999-04-19
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公开(公告)号: US06377898B1公开(公告)日: 2002-04-23
- 发明人: Paul J. Steffan , Allen S. Yu
- 申请人: Paul J. Steffan , Allen S. Yu
- 主分类号: G06F1900
- IPC分类号: G06F1900
摘要:
A method of analyzing and classifying defects on semiconductor wafers during a semiconductor manufacturing process using a comparator die selector system wherein an automatic defect classification review tool compares defects on a die location with an identical location on an identical die. The automatic defect classification review tool locates identical die with information from the comparator die selector system.