发明授权
- 专利标题: Photoimageable, aqueous acid soluble polyimide polymers
- 专利标题(中): 可光成像,含水酸溶性聚酰亚胺聚合物
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申请号: US09547390申请日: 2000-04-11
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公开(公告)号: US06379865B1公开(公告)日: 2002-04-30
- 发明人: Guoping Mao , Hany B. Eitouni , Alphonsus V. Pocius , John B. Scheibner , Nanayakkara L. D. Somasiri , Nicholas A. Stacey , Alfred Viehbeck
- 申请人: Guoping Mao , Hany B. Eitouni , Alphonsus V. Pocius , John B. Scheibner , Nanayakkara L. D. Somasiri , Nicholas A. Stacey , Alfred Viehbeck
- 主分类号: G03F709
- IPC分类号: G03F709
摘要:
A photoimageable, aqueous acid soluble polyimide polymer comprising an anhydride, including a substituted benzophenone nucleus, a diamine reacted with the anhydride to form a photosensitive polymer intermediate, and at least 60 Mole % of solubilizing amine reacted with the photosensitive polymer intermediate to form the photoimageable, aqueous acid soluble polyimide polymer. An emulsion for electrophoretic deposition of a coating of a photoimageable, aqueous acid soluble polyimide polymer comprises a dispersed phase, including the photoimageable aqueous acid soluble polyimide polymer, dissolved in an organic solvent and a dispersion phase including a coalescence promoter and water. The emulsion may be applied, by electrophoretic deposition, to a conductive structure to provide a photoimageable coating on the conductive structure. After exposing the coating to a pattern of radiation for photocrosslinking exposed parts of the photoimageable aqueous acid soluble polyimide polymer, an aqueous acid developer solution removes unexposed photoimageable aqueous acid soluble polyimide polymer to reveal a crosslinked polyimide polymer image of the radiation pattern.