发明授权
US06380034B1 Process for manufacturing memory cells with dimensional control of the floating gate regions
有权
用于制造具有浮动栅极区域的尺寸控制的存储器单元的工艺
- 专利标题: Process for manufacturing memory cells with dimensional control of the floating gate regions
- 专利标题(中): 用于制造具有浮动栅极区域的尺寸控制的存储器单元的工艺
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申请号: US09619861申请日: 2000-07-20
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公开(公告)号: US06380034B1公开(公告)日: 2002-04-30
- 发明人: Bruno Vajana , Giovanna Dalla Libera
- 申请人: Bruno Vajana , Giovanna Dalla Libera
- 优先权: EP99830470 19990722
- 主分类号: H01L218247
- IPC分类号: H01L218247
摘要:
A manufacturing process including: forming a substrate and insulating layer including a tunnel area; and simultaneously forming a floating gate region of a memory transistor and a lower gate portion of a selection transistor, the floating gate region internally forming a hole, one side of which delimits, together with an external side of the floating gate region, a portion of tunnel arranged above the tunnel area; a dielectric material layer is then deposited, and fills the hole of the floating gate region; the structure is planarized by CMP, and an insulating region of dielectric material is formed; and a control gate region is formed above the floating gate region and simultaneously an upper gate portion is formed above the lower gate portion. The upper and lower gate portions form a control gate region of the selection transistor. In this way, the upper gate portion and the control gate region are substantially on the same level.