发明授权
US06381165B1 Semiconductor memory device having storage node electrodes offset from each other
有权
具有彼此偏移的存储节点电极的半导体存储器件
- 专利标题: Semiconductor memory device having storage node electrodes offset from each other
- 专利标题(中): 具有彼此偏移的存储节点电极的半导体存储器件
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申请号: US09966785申请日: 2001-09-28
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公开(公告)号: US06381165B1公开(公告)日: 2002-04-30
- 发明人: Jung-hyeon Lee , Han-ku Cho
- 申请人: Jung-hyeon Lee , Han-ku Cho
- 优先权: KR2001-17947 20010404
- 主分类号: G11C502
- IPC分类号: G11C502
摘要:
A semiconductor memory device that is capable of reducing the probability of a bridge being generated between storage node electrodes, and a mask pattern for defining the storage node electrodes, are provided. The semiconductor memory device includes a plurality of storage node electrodes that are vertically and horizontally arranged a predetermined distance apart in columns and rows, respectively. Among the plurality of storage node electrodes, storage node electrodes belonging to even-numbered columns are shifted up or down a predetermined distance. The shifted storage node electrodes are shifted in a gap between vertically adjacent storage node electrodes belonging to a same column.
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