发明授权
US06386957B1 Workpiece holder for polishing, method for producing the same, method for polishing workpiece, and polishing apparatus 失效
用于抛光的工件支架,其制造方法,抛光工件的方法和抛光装置

Workpiece holder for polishing, method for producing the same, method for polishing workpiece, and polishing apparatus
摘要:
By improving the material of workpiece holder body of a workpiece holder for polishing that holds a workpiece by vacuum adsorption, and the material of resin film for coating a workpiece holding surface of the holder, and developing a method for coating the surface with a resin, which does not cause blocking of perforated holes of the holder body with the resin during the resin coating process, there are provided a workpiece holder for polishing having a workpiece holding surface of high precision, and a method for producing it. According to the present invention, there are provided a workpiece holder for polishing having a workpiece holder body provided with multiple perforated holes for holding a workpiece by vacuum adsorption, wherein a holding surface of the holder body is coated with a coating film formed by applying a thermosetting resin on the holding surface and curing it with heating, and a surface of the coating film is polished, and a method for producing it.
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