发明授权
- 专利标题: Positive photoresist composition
- 专利标题(中): 正光致抗蚀剂组合物
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申请号: US09671177申请日: 2000-09-28
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公开(公告)号: US06387590B1公开(公告)日: 2002-05-14
- 发明人: Kazuyoshi Mizutani , Shoichiro Yasunami
- 申请人: Kazuyoshi Mizutani , Shoichiro Yasunami
- 优先权: JP11-275332 19990928; JP11-275335 19990928; JP11-277016 19990929; JP11-277017 19990929
- 主分类号: G03F7004
- IPC分类号: G03F7004
摘要:
Disclosed is a positive photoresist composition comprising a polysiloxane containing as a copolymerization component at least a structural unit represented by the following formula (I): wherein L represents a single bond or an arylene group, A′ represents an aromacyclic or alicyclic structure which may have a substituent, and n represents an integer of 1 to 6.
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