发明授权
US06387590B1 Positive photoresist composition 失效
正光致抗蚀剂组合物

  • 专利标题: Positive photoresist composition
  • 专利标题(中): 正光致抗蚀剂组合物
  • 申请号: US09671177
    申请日: 2000-09-28
  • 公开(公告)号: US06387590B1
    公开(公告)日: 2002-05-14
  • 发明人: Kazuyoshi MizutaniShoichiro Yasunami
  • 申请人: Kazuyoshi MizutaniShoichiro Yasunami
  • 优先权: JP11-275332 19990928; JP11-275335 19990928; JP11-277016 19990929; JP11-277017 19990929
  • 主分类号: G03F7004
  • IPC分类号: G03F7004
Positive photoresist composition
摘要:
Disclosed is a positive photoresist composition comprising a polysiloxane containing as a copolymerization component at least a structural unit represented by the following formula (I): wherein L represents a single bond or an arylene group, A′ represents an aromacyclic or alicyclic structure which may have a substituent, and n represents an integer of 1 to 6.
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