发明授权
- 专利标题: Fiducial beam position monitor
- 专利标题(中): 基准光束位置监视器
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申请号: US09320673申请日: 1999-05-27
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公开(公告)号: US06392242B1公开(公告)日: 2002-05-21
- 发明人: F. Keith Perkins , Daniel McCarthy , Martin C. Peckerar , Christie R. K. Marrian , Eric S. Snow
- 申请人: F. Keith Perkins , Daniel McCarthy , Martin C. Peckerar , Christie R. K. Marrian , Eric S. Snow
- 主分类号: G01I100
- IPC分类号: G01I100
摘要:
A fiducial beam monitor includes a patterned diode layer on a semiconducting substrate. An electrical field between the diode (or diodes) on the diode layer and the semiconducting substrate modulates the size of the depletion layer formed by the diode or diode. A high energy beam incident upon a diode on the diode layer produces a greater current than a high energy beam incident upon a non-diodic region of the same layer. In use, the beam monitor is typically fixed to the backside of a workpiece such as a semitransparent membrane being patterned by a focused high energy beam that is translated with respect to workpiece and attached monitor. The changes in current during translation are then correlated with the position of the beam with respect to the pattern on the diode layer.