发明授权
- 专利标题: Method for fabricating a inductor of low parasitic resistance and capacitance
- 专利标题(中): 制造低寄生电阻和电容的电感器的方法
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申请号: US09168343申请日: 1998-10-07
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公开(公告)号: US06395637B1公开(公告)日: 2002-05-28
- 发明人: Min Park , Cheon Soo Kim , Hyun Kyu Yu
- 申请人: Min Park , Cheon Soo Kim , Hyun Kyu Yu
- 优先权: KR97-65704 19971203
- 主分类号: H01L21302
- IPC分类号: H01L21302
摘要:
The present invention relates to a method for fabricating an inductor and, more particularly, to a method for fabricating a spiral inductor used in a monolithic microwave integrated circuit on a silicon substrate using semiconductor fabrication processes. The method for fabricating an inductor, comprising the steps of: forming a first dielectric layer on a silicon substrate and forming a first metal wire on the first dielectric layer, wherein the first metal wire is in contact with an active element formed on the silicon substrate; and alternatively forming dielectric layers and metal layers, wherein the metal layers are electrically connected with an upper metal wire and a lower metal wire and wherein the metal layers are patterned using the dielectric layers as etching mask, whereby a metal corrosion is prevented by using the spiral dielectric pattern as the etching mask.
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