发明授权
US06395637B1 Method for fabricating a inductor of low parasitic resistance and capacitance 有权
制造低寄生电阻和电容的电感器的方法

  • 专利标题: Method for fabricating a inductor of low parasitic resistance and capacitance
  • 专利标题(中): 制造低寄生电阻和电容的电感器的方法
  • 申请号: US09168343
    申请日: 1998-10-07
  • 公开(公告)号: US06395637B1
    公开(公告)日: 2002-05-28
  • 发明人: Min ParkCheon Soo KimHyun Kyu Yu
  • 申请人: Min ParkCheon Soo KimHyun Kyu Yu
  • 优先权: KR97-65704 19971203
  • 主分类号: H01L21302
  • IPC分类号: H01L21302
Method for fabricating a inductor of low parasitic resistance and capacitance
摘要:
The present invention relates to a method for fabricating an inductor and, more particularly, to a method for fabricating a spiral inductor used in a monolithic microwave integrated circuit on a silicon substrate using semiconductor fabrication processes. The method for fabricating an inductor, comprising the steps of: forming a first dielectric layer on a silicon substrate and forming a first metal wire on the first dielectric layer, wherein the first metal wire is in contact with an active element formed on the silicon substrate; and alternatively forming dielectric layers and metal layers, wherein the metal layers are electrically connected with an upper metal wire and a lower metal wire and wherein the metal layers are patterned using the dielectric layers as etching mask, whereby a metal corrosion is prevented by using the spiral dielectric pattern as the etching mask.
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