Invention Grant
- Patent Title: Semiconductor memory and method of driving semiconductor memory
- Patent Title (中): 半导体存储器和驱动半导体存储器的方法
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Application No.: US09869522Application Date: 2001-06-29
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Publication No.: US06396095B1Publication Date: 2002-05-28
- Inventor: Yasuhiro Shimada , Koji Arita , Kiyoshi Uchiyama
- Applicant: Yasuhiro Shimada , Koji Arita , Kiyoshi Uchiyama
- Priority: JP11-309329 19991029
- Main IPC: H01L2976
- IPC: H01L2976

Abstract:
Source/drain regions for a field effect transistor are defined in a semiconductor substrate with a channel region interposed therebetween. A first gate electrode is formed over the semiconductor substrate with an insulating film sandwiched therebetween and has a gate length shorter than the length of the channel region. A ferroelectric film is formed to cover the first gate electrode and to have both side portions thereof make contact with the insulating film. A second gate electrode is formed to cover the ferroelectric film.
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