发明授权
- 专利标题: Beam shaping element for use in a lithographic system
- 专利标题(中): 用于光刻系统的光束成形元件
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申请号: US09902740申请日: 2001-07-12
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公开(公告)号: US06396635B2公开(公告)日: 2002-05-28
- 发明人: Alan D. Kathman , Michael R. Feldman
- 申请人: Alan D. Kathman , Michael R. Feldman
- 主分类号: G02B502
- IPC分类号: G02B502
摘要:
A beam homogenizer that minimizes undesired intensity variations at the output plane caused by sharp breaks between facets in previous embodiments. The homogenizer includes a hologram made up of irregularly patterned diffractive fringes. An input beam illuminates at least part of the hologram. The hologram transmits a portion of the input beam onto an output plane. In doing so, the energy of the input beam is spatially redistributed at the output plane into a homogenized output beam having a preselected spatial energy distribution at the output plane. Thus, the illuminated portion of the output plane has a shape predetermined by the designer of the homogenizer.
公开/授权文献
- US20010046073A1 Beam shaping element for use in a lithographic system 公开/授权日:2001-11-29