发明授权
- 专利标题： Microscopic corner radius measurement system
- 专利标题（中）： 显微镜角半径测量系统
-
申请号： US09877647申请日： 2001-06-07
-
公开(公告)号： US06397165B1公开(公告)日： 2002-05-28
- 发明人: Peter J. Fiekowsky
- 申请人： Peter J. Fiekowsky
- 主分类号： G03B2742
- IPC分类号： G03B2742
摘要：
A measurement tool connects to a microscope for identifying and measuring microscopic dimensions of features on a photographic mask such as area, diameter and corner radius. Dimensions of features having sizes of less than about twice the wavelength being used (less than 1 micron for visible light) are measured quickly and accurately. The radius of curvature is also determined at submicron sizes using a flux measurement. Determination of the expected flux of a perfect comer aids in the measurement.
信息查询
