发明授权
- 专利标题: Dynamic break for non-contact wafer holder
- 专利标题(中): 非接触式晶圆座的动态断裂
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申请号: US09456094申请日: 1999-12-07
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公开(公告)号: US06398823B1公开(公告)日: 2002-06-04
- 发明人: Oleg Siniaguine , Alex Berger
- 申请人: Oleg Siniaguine , Alex Berger
- 主分类号: H01L2100
- IPC分类号: H01L2100
摘要:
The present invention comprises a dynamic brake that applies restraining frictional force to a wafer in a wafer holder while the wafer holder is substantially at rest, but releases the restraining force as the processing carousel containing several wafer holders rotates about a central axis of the carousel. This dynamic brake preferably comprises a boot that passes through an opening in the wafer holder to rest on the surface of the wafer in an exclusion zone near the wafer's edge. The exclusion zone is typically no more than about 3mm in extent. The frictional force between the boot and wafer is sufficient to prevent unwanted motion of the wafer in the holder. As the wafer holder rotates about a central axis of the processing carousel, centrifugal forces applied to the brake arising from such rotation cause the boot to pivot upward, releasing the frictional force on the wafer.
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