发明授权
- 专利标题: Hermetically-sealed sensor with a movable microstructure
- 专利标题(中): 密封传感器具有可移动的微结构
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申请号: US09100838申请日: 1998-06-19
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公开(公告)号: US06405592B1公开(公告)日: 2002-06-18
- 发明人: Bruno Murari , Benedetto Vigna , Paolo Ferrari
- 申请人: Bruno Murari , Benedetto Vigna , Paolo Ferrari
- 优先权: EP97830290 19970619
- 主分类号: G01P102
- IPC分类号: G01P102
摘要:
A sensor with a movable microstructure including a sensitive element, formed in a first chip of semiconductor material for producing an electrical signal dependent on a movement of at least one movable microstructure relative to a surface of the first chip. The sensitive element is enclosed in a hollow hermetic structure, and circuitry for processing the electrical signal is formed in a second chip of semiconductor material. The hollow hermetic structure includes a metal wall disposed on the surface of the first chip around the sensitive element, and the second chip is fixed to the metal wall.
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