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公开(公告)号：US08024977B2
公开(公告)日：2011-09-27
申请号：US12049915
申请日：2008-03-17
IPC分类号： G01L9/06
CPC分类号： G01L9/0054 , G01L1/02 , G01L5/225 , G01L9/0045 , G01L9/0089 , G01L19/0645 , G01L19/146
摘要： A pressure sensor including a pressure-sensor element having a monolithic body of semiconductor material, and a first main face and a second main face acting on which is a stress resulting from a pressure, the value of which is to be determined; and a package enclosing the pressure-sensor element. The package has an inner chamber containing liquid material, and the pressure-sensor element is arranged within the inner chamber in such a manner that the first and second main faces are both in contact with the liquid material. In particular, the liquid material is a silicone gel.
摘要翻译： 一种压力传感器，包括具有半导体材料的整体式的压力传感器元件以及作用于其上的第一主面和第二主面，所述第一主面和第二主面是由压力导致的应力，其值应被确定; 以及封装压力传感器元件的包装。 所述包装体具有容纳液体材料的内部室，并且所述压力传感器元件以使得所述第一主面和所述第二主面都与所述液体材料接触的方式配置在所述内部室内。 特别地，液体材料是硅胶。
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公开(公告)号：US07898267B2
公开(公告)日：2011-03-01
申请号：US12573027
申请日：2009-10-02
CPC分类号： H02N1/006
摘要： An electrostatic micromotor is provided with a fixed substrate, a mobile substrate facing the fixed substrate, and electrostatic-interaction elements enabling a relative movement of the mobile substrate with respect to the fixed substrate in a movement direction; the electrostatic micromotor is also provided with a capacitive position-sensing structure configured to enable sensing of a relative position of the mobile substrate with respect to the fixed substrate in the movement direction. The capacitive position-sensing structure is formed by sensing indentation, extending within the mobile substrate from a first surface thereof, and by first sensing electrode, facing, in given operating condition, the sensing indentation.
摘要翻译： 静电微电机设置有固定基板，面向固定基板的移动基板和静电相互作用元件，其能够使移动基板相对于固定基板在移动方向上相对移动; 静电微型电动机还设置有电容位置感测结构，其被配置为能够在移动方向上感测移动衬底相对于固定衬底的相对位置。 电容式位置检测结构通过感测从移动基板的第一表面延伸的凹陷形成，并且通过第一感测电极，在给定的操作条件下面对感测压痕。
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公开(公告)号：US20100019617A1
公开(公告)日：2010-01-28
申请号：US12573027
申请日：2009-10-02
CPC分类号： H02N1/006
摘要： An electrostatic micromotor is provided with a fixed substrate, a mobile substrate facing the fixed substrate, and electrostatic-interaction elements enabling a relative movement of the mobile substrate with respect to the fixed substrate in a movement direction; the electrostatic micromotor is also provided with a capacitive position-sensing structure configured to enable sensing of a relative position of the mobile substrate with respect to the fixed substrate in the movement direction. The capacitive position-sensing structure is formed by sensing indentation, extending within the mobile substrate from a first surface thereof, and by first sensing electrode, facing, in given operating condition, the sensing indentation.
摘要翻译： 静电微电机设置有固定基板，面向固定基板的移动基板和静电相互作用元件，其能够使移动基板相对于固定基板在移动方向上相对移动; 静电微型电动机还设置有电容位置感测结构，其被配置为能够在移动方向上感测移动衬底相对于固定衬底的相对位置。 电容式位置检测结构通过感测从移动基板的第一表面延伸的凹陷形成，并且通过第一感测电极，在给定的操作条件下面对感测压痕。
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公开(公告)号：US20090095705A1
公开(公告)日：2009-04-16
申请号：US12246384
申请日：2008-10-06
申请人： Caterina Riva , Bruno Murari , Giovanni Frattini
发明人： Caterina Riva , Bruno Murari , Giovanni Frattini
IPC分类号： B44C1/22
CPC分类号： G11B9/1409 , B82Y10/00 , G11B9/14
摘要： A process manufactures an interaction structure for a storage medium. The process includes forming a first interaction head provided with a first conductive region having a sub-lithographic dimension. The step of forming a first interaction head includes: forming on a surface a first delimitation region having a side wall; depositing a conductive portion having a deposition thickness substantially matching the sub-lithographic dimension on the side wall; and then defining the conductive portion. The sub-lithographic dimension preferably is between 1 and 50 nm, more preferably 20 nm.
摘要翻译： 过程制造存储介质的交互结构。 该方法包括形成具有具有亚光刻尺寸的第一导电区域的第一相互作用头。 形成第一相互作用头的步骤包括：在表面上形成具有侧壁的第一划界区域; 沉积具有基本上与侧壁上的亚光刻尺寸匹配的沉积厚度的导电部分; 然后限定导电部分。 亚光刻尺寸优选在1至50nm之间，更优选20nm。
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公开(公告)号：US20080223143A1
公开(公告)日：2008-09-18
申请号：US12049915
申请日：2008-03-17
CPC分类号： G01L9/0054 , G01L1/02 , G01L5/225 , G01L9/0045 , G01L9/0089 , G01L19/0645 , G01L19/146
摘要： A pressure sensor including a pressure-sensor element having a monolithic body of semiconductor material, and a first main face and a second main face acting on which is a stress resulting from a pressure, the value of which is to be determined; and a package enclosing the pressure-sensor element. The package has an inner chamber containing liquid material, and the pressure-sensor element is arranged within the inner chamber in such a manner that the first and second main faces are both in contact with the liquid material. In particular, the liquid material is a silicone gel.
摘要翻译： 一种压力传感器，包括具有半导体材料的整体式的压力传感器元件以及作用于其上的第一主面和第二主面，所述第一主面和第二主面是由压力导致的应力，其值应被确定; 以及封装压力传感器元件的包装。 所述包装体具有容纳液体材料的内部室，并且所述压力传感器元件以使得所述第一主面和所述第二主面都与所述液体材料接触的方式配置在所述内部室内。 特别地，液体材料是硅胶。
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6.发明申请公开(公告)号：US20060032310A1
公开(公告)日：2006-02-16
申请号：US11201268
申请日：2005-08-10
申请人： Angelo Merassi , Bruno Murari , Sarah Zerbini
发明人： Angelo Merassi , Bruno Murari , Sarah Zerbini
CPC分类号： G01P15/125 , B81B7/0048 , B81B2201/0235 , G01P1/006 , G01P2015/082
摘要： In a micro-electromechanical structure, a rotor has a centroidal axis and includes a suspended structure which carries mobile electrodes. A stator carries fixed electrodes facing the mobile electrodes. The suspended structure is connected to a rotor-anchoring region via elastic elements. The stator includes at least one stator element, which carries a plurality of fixed electrodes and is fixed to a stator-anchoring region. One of the rotor-anchoring regions and stator-anchoring regions extends along the centroidal axis and at least another of the rotor-anchoring regions and stator-anchoring regions extends in the proximity of the centroidal axis.
摘要翻译： 在微机电结构中，转子具有重心轴线，并且包括携带移动电极的悬挂结构。 定子承载面向移动电极的固定电极。 悬挂结构通过弹性元件连接到转子 - 锚定区域。 定子包括至少一个定子元件，该定子元件承载多个固定电极并固定到定子 - 锚定区域。 转子锚定区域和定子 - 锚定区域之一沿着重心轴线延伸，并且至少另一个转子 - 锚定区域和定子 - 锚定区域在重心轴线附近延伸。
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公开(公告)号：US06969637B2
公开(公告)日：2005-11-29
申请号：US10893021
申请日：2004-07-16
IPC分类号： H01L23/31 , H01L23/36 , H01L23/373 , H01L23/482 , H01L21/44 , H01L21/301 , H01L21/46 , H01L21/48 , H01L21/50
CPC分类号： H01L24/01 , H01L23/3157 , H01L23/36 , H01L23/3735 , H01L23/4827 , H01L2224/274 , H01L2924/01005 , H01L2924/01006 , H01L2924/01015 , H01L2924/01029 , H01L2924/01033 , H01L2924/01079 , H01L2924/01082
摘要： The electronic device is formed in a die including a body of semiconductor material having a first face covered by a covering structure and a second face. An integral thermal spreader of metal is grown galvanically on the second face during the manufacture of a wafer, prior to cutting into dice. The covering structure comprises a passivation region and a protective region of opaque polyimide; the protective region and the passivation region are opened above the contact pads for the passage of leads.
摘要翻译： 电子器件形成在包括半导体材料体的模具中，该半导体材料体具有被覆盖结构覆盖的第一面和第二面。 在切割成骰子之前，在制造晶片期间，金属的整体散热器在第二面上电镀生长。 覆盖结构包括钝化区域和不透明聚酰亚胺的保护区域; 保护区域和钝化区域在接触焊盘上方打开以引导引线通过。
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8.发明授权Micromachined oscillating element, in particular a mirror for optical switches 有权微机械振荡元件，特别是光开关的反射镜公开(公告)号：US06927470B2
公开(公告)日：2005-08-09
申请号：US10606660
申请日：2003-06-25
申请人： Bruno Murari , Ubaldo Mastromatteo , Paolo Ferrari
发明人： Bruno Murari , Ubaldo Mastromatteo , Paolo Ferrari
IPC分类号： G02B26/00 , G02B27/09 , H01L31/0232 , H01L31/0328
CPC分类号： G02B27/0994
摘要： A micromachined device made of semiconductor material is formed by: a semiconductor body; an intermediate layer set on top of the semiconductor body; and a substrate, set on top of the intermediate layer. A cavity extends in the intermediate layer and is delimited laterally by bottom fixed regions, at the top by the substrate, and at the bottom by the semiconductor body. The bottom fixed regions form fixed electrodes, which extend in the intermediate layer towards the inside of the cavity. An oscillating element is formed in the substrate above the cavity and is separated from top fixed regions through trenches, which extend throughout the thickness of the substrate. The oscillating element is formed by an oscillating platform set above the cavity, and by mobile electrodes, which extend towards the top fixed regions in a staggered way with respect to the fixed electrodes. The fixed electrodes and mobile electrodes are thus comb-fingered in plan view but formed on different levels.
摘要翻译： 由半导体材料制成的微机械加工装置由半导体本体形成， 设置在半导体本体顶部的中间层; 以及设置在中间层顶部的基板。 空腔在中间层中延伸并且由底部固定区域在顶部限定，在顶部由衬底限定，并且在底部由半导体本体限定。 底部固定区域形成固定电极，其在中间层中延伸到空腔的内部。 振荡元件形成在空腔上方的衬底中，并且通过沟槽与顶部固定区域分离，其延伸贯穿衬底的厚度。 振荡元件由设置在空腔上方的振荡平台和通过相对于固定电极以交错方式朝着顶部固定区域延伸的移动电极形成。 因此，固定电极和移动电极在平面图中梳理，但形成在不同的水平上。
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9.发明授权Method of producing suspended elements for electrical connection between two portions of a micromechanism which can move relative to one another 有权制造可以相对于彼此移动的微机构的两个部分之间的电连接的悬挂元件的方法公开(公告)号：US06779247B1
公开(公告)日：2004-08-24
申请号：US09676017
申请日：2000-09-29
IPC分类号： G11B5127
CPC分类号： G11B7/22 , G11B5/53 , G11B7/122 , Y10T29/49021 , Y10T29/49041
摘要： A method of producing suspended elements for electrical connection between two portions of a micro-mechanism that can move relative to one another provides for the formation of a layer of sacrificial material, the formation of the electrical connection elements on the layer of sacrificial material, and the selective removal of the layer of sacrificial material beneath the electrical connecting elements, the layer of sacrificial material being a thin film with at least one adhesive side that can be applied dry to the surface of the micro-mechanism.
摘要翻译： 一种用于在微机构的两部分之间进行电连接的悬挂元件的制造方法，该微机构可以相对于彼此移动，从而形成牺牲材料层，在牺牲材料层上形成电连接元件，以及 选择性地去除电连接元件下面的牺牲材料层，牺牲材料层是具有至少一个可以干燥地施加到微机构表面的粘合剂侧的薄膜。
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公开(公告)号：US06532130B1
公开(公告)日：2003-03-11
申请号：US09116406
申请日：1998-07-16
申请人： Bruno Murari , Benedetto Vigna , Paolo Ferrari
发明人： Bruno Murari , Benedetto Vigna , Paolo Ferrari
IPC分类号： G11B5596
CPC分类号： G11B5/3922 , G11B5/2654 , G11B5/3103 , G11B5/3183 , G11B5/3948 , G11B5/3958 , G11B5/4886 , G11B5/5526 , G11B5/553
摘要： A head (130) for a disk storage device having a plurality of tracks (117) divided into memory cells (234), including a magnetic circuit (205, 230a, 230b, 250a, 250b) for reading the memory cells (234) in succession, the magnetic circuit (205, 230a, 230b, 250a, 250b) for reading the memory cells (234) including at least two partial reading components (206a, 230a, 250a; 206b, 230b, 250b) each for reading a portion (234a; 234b) of each memory cell (234), the portions (234a; 234b) being arranged transversely relative to the longitudinal axis (233) of the corresponding track (117).
摘要翻译： 一种用于盘存储装置的磁头（130），其具有分成存储单元（234）的多个磁道（117），包括用于读取存储单元（234）的磁路（205,230a，230b，250a，250b） 用于读取包括至少两个部分读取组件（206a，230a，250a; 206b，230b，250b）的存储单元（234）的磁路（205,230a，230b，250a，250b） 234a，234b），所述部分（234a; 234b）相对于对应轨道（117）的纵向轴线（233）横向设置。
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