发明授权
- 专利标题: Composition for film formation, method of film formation, and insulating film
- 专利标题(中): 用于成膜的成分,成膜方法和绝缘膜
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申请号: US09670547申请日: 2000-09-27
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公开(公告)号: US06410151B1公开(公告)日: 2002-06-25
- 发明人: Takahiko Kurosawa , Eiji Hayashi , Seo Youngsoon , Atsushi Shiota , Kinji Yamada
- 申请人: Takahiko Kurosawa , Eiji Hayashi , Seo Youngsoon , Atsushi Shiota , Kinji Yamada
- 优先权: JP11-275554 19990929
- 主分类号: B32B904
- IPC分类号: B32B904
摘要:
A polyorganosiloxane-based composition for film formation which gives a film having low dielectric constant and high modulus of elasticity and useful as an interlayer insulating film in semiconductor devices and the like. The composition for film formation comprises: (A) a product of hydrolysis and condensation obtained by hydrolyzing and condensing, in the presence of an alkali catalyst, at least one member selected from the group consisting of compounds (1) represented by RaSi (OR1)4−a (wherein R represents hydrogen, fluorine, or a monovalent organic group; R1 represents a monovalent organic group; and a Is an integer of 1 or 2), compounds (2) represented by Si(OR2)4 (wherein R2 represents a monovalent organic group), and compounds (3) represented by R3b(R4O)3−bSi—(R7)d—Si(OR5)3−cR6c [wherein R3 to R6 may be the same or different and each represent a monovalent organic group; b and c may be the same or different and each are an integer of 0 to 2; R7 represents oxygen, phenylene, or a group represented by —(CH2)n—, wherein n is an integer of 1 to 6; and d is 0 or 1]; and (B) a product of hydrolysis and condensation obtained by hydrolyzing and condensing, in the presence of a metal chelate compound catalyst, at least one member selected from the group consisting of the compounds (1), (2), and (3).
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