Invention Grant
US06413388B1 Pad designs and structures for a versatile materials processing apparatus
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垫片设计和结构,用于多功能材料加工设备
- Patent Title: Pad designs and structures for a versatile materials processing apparatus
- Patent Title (中): 垫片设计和结构,用于多功能材料加工设备
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Application No.: US09511278Application Date: 2000-02-23
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Publication No.: US06413388B1Publication Date: 2002-07-02
- Inventor: Cyprian Uzoh , Bulent Basol , Homayoun Talieh
- Applicant: Cyprian Uzoh , Bulent Basol , Homayoun Talieh
- Main IPC: C25D1700
- IPC: C25D1700
![Pad designs and structures for a versatile materials processing apparatus](/abs-image/US/2002/07/02/US06413388B1/abs.jpg.150x150.jpg)
Abstract:
An apparatus capable of assisting in controlling an electrolyte flow and an electric field distribution used for processing a substrate is provided. It includes a rigid member having a top surface of a predetermined shape and a bottom surface. The rigid member contains a plurality of channels, each forming a passage from the top surface to the bottom surface, and each allowing the electrolyte and electric field flow therethrough. A pad is attached to the rigid member via a fastener. The pad also allows for electrolyte and electric field flow therethrough to the substrate.
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