发明授权
US06423625B1 Method of improving the bondability between Au wires and Cu bonding pads
有权
提高Au线和Cu焊盘之间的粘接性的方法
- 专利标题: Method of improving the bondability between Au wires and Cu bonding pads
- 专利标题(中): 提高Au线和Cu焊盘之间的粘接性的方法
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申请号: US09385754申请日: 1999-08-30
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公开(公告)号: US06423625B1公开(公告)日: 2002-07-23
- 发明人: Syun-Ming Jang , Mong-Song Liang , Chen-Hua Yu , Chung-Shi Liu , Jane-Bai Lai
- 申请人: Syun-Ming Jang , Mong-Song Liang , Chen-Hua Yu , Chung-Shi Liu , Jane-Bai Lai
- 主分类号: H01L2160
- IPC分类号: H01L2160
摘要:
Cu, for its rather loe resistivity, will be widely used in sub-quarter micron meter ULSI devices. However, it is well known that Cu is easy to be corroded as exposed in air. In packaging of chips the bonding pads making of Cu will thus oxides. In addition, the reaction between Au-ball and Cu pads is very poor. On the other hand, a native AlOx layer, about 3-4 nm in thickness, will form as Al exposes in air; the formed layer is inert and is capable of protecting Al from corrosion. Furthermore, the reaction between Au-ball and Al was very well. Therefore, with the methods of the present invention, Al or AlCu as a glue and protection layer is implemented on Cu bonding pads for successful Au wiring.
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