发明授权
- 专利标题： Self-aligning cylindrical mandrel assembly and wafer preparation apparatus including the same
- 专利标题（中）： 自调心圆筒形心轴组件和包括其的晶片制备装置
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申请号： US09540160申请日： 2000-03-31
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公开(公告)号： US06427566B1公开(公告)日： 2002-08-06
- 发明人: Oliver David Jones , John G. Dewit
- 申请人： Oliver David Jones , John G. Dewit
- 主分类号： B08B104
- IPC分类号： B08B104
摘要：
A self-aligning mandrel assembly is provided. The assembly includes a cylindrical inner core and a fulcrum disposed on an outer surface of the cylindrical inner core. A mandrel shell surrounds the cylindrical inner core. The mandrel shell has a wafer preparation material affixed to an outer surface thereof, and the mandrel shell is pivotably supported by the fulcrum such that the mandrel shell aligns with a surface of a substrate when the wafer preparation material contacts the surface of the substrate.
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