发明授权
US06431814B1 Integrated wafer stocker and sorter with integrity verification system
失效
集成晶圆储片器和分拣机,具有完整性验证系统
- 专利标题: Integrated wafer stocker and sorter with integrity verification system
- 专利标题(中): 集成晶圆储片器和分拣机,具有完整性验证系统
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申请号: US09578101申请日: 2000-05-22
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公开(公告)号: US06431814B1公开(公告)日: 2002-08-13
- 发明人: Eric Christensen , Russel Shirley , Michael R. Conboy , Elfido Coss, Jr.
- 申请人: Eric Christensen , Russel Shirley , Michael R. Conboy , Elfido Coss, Jr.
- 主分类号: B65B2102
- IPC分类号: B65B2102
摘要:
A system for verifying the integrity of components moving within a material handling system ensures that only components of acceptable integrity and condition are allowed to move onto the processing locations of a semiconductor plant. In an example embodiment, components that are warped or cracked are initially detected and scanned by a beam break system and/or an optical system. An integrity verification assessment is made immediately on the component to determine whether the scanned component meets with a predefined baseline parameter or characteristic. The components that do not pass integrity verification are then removed from the material handling system while the components that pass move on to the first processing location.