发明授权
- 专利标题: Row electrode anodization
- 专利标题(中): 行电极阳极氧化
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申请号: US09258021申请日: 1999-02-25
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公开(公告)号: US06433473B1公开(公告)日: 2002-08-13
- 发明人: Kishore K. Chakravorty , Fariborz Nadi , Christopher J. Spindt , Ronald L. Hansen , Colin D. Stanners
- 申请人: Kishore K. Chakravorty , Fariborz Nadi , Christopher J. Spindt , Ronald L. Hansen , Colin D. Stanners
- 主分类号: H01J162
- IPC分类号: H01J162
摘要:
A structure and method for forming an column electrode for a field emission display device wherein the column electrode is disposed beneath the field emitters and the row electrode. In one embodiment, the present invention comprises depositing a resistor layer over portions of a column electrode. Next, an inter-metal dielectric layer is deposited over the column electrode. In the present embodiment, the inter-metal dielectric layer is deposited over portions of the resistor layer and over pad areas of the column electrode. After the deposition of the inter-metal dielectric layer, the column electrode is subjected to an anodization process such that exposed regions of the column electrode are anodized. In so doing, the present invention provides a column electrode structure which is resistant to column to row electrode shorts and which is protected from subsequent processing steps.
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