发明授权
- 专利标题: Cathode mounting system for cathodic arc cathodes
- 专利标题(中): 阴极阴极阴极安装系统
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申请号: US09824636申请日: 2001-04-03
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公开(公告)号: US06436254B1公开(公告)日: 2002-08-20
- 发明人: Scott Andrew Weaver , Don Mark Lipkin , Reed Roeder Corderman , Terry Clifford Cooper
- 申请人: Scott Andrew Weaver , Don Mark Lipkin , Reed Roeder Corderman , Terry Clifford Cooper
- 主分类号: C23C1434
- IPC分类号: C23C1434
摘要:
An apparatus for cathodic arc coating. The apparatus includes: a vacuum chamber which includes: an anode; a power supply; and a cathode target assembly connected to the power supply. The cathode target assembly includes a cathode target having an interference fit stud with a threadless distal end. In the preferred embodiment, the distal end of the threadless cathode target also includes a pre-determined surface texture and a cooling block in contact with the cathode target.
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