Physical vapor deposition apparatus and process
    1.
    发明授权
    Physical vapor deposition apparatus and process 有权
    物理气相沉积装置及工艺

    公开(公告)号:US06869508B2

    公开(公告)日:2005-03-22

    申请号:US10063808

    申请日:2002-05-15

    摘要: A PVD process and apparatus (120) for depositing a coating (132) from multiple sources (110, 111) of different materials. The process and apparatus (120) are particulaity intended to deposit a beta-nickel aluminide coating (132) containing one or more elements whose vapor pressures are lower than NiAl. The PVD process and apparatus (120) entail feeding at least two materials (110, 111) into a coating chamber (122) and evaporating the materials (110, 111) at different rates from separate molten pools (114, 115) thereof. Articles (130) to be coated are suspended within the coating chamber (122), and transported with a support apparatus (118) relative to the two molten pools (114, 115) so as to deposit a coating (132) with a controlled composition that is a mixture of the first and second materials (110, 111).

    摘要翻译: 一种用于从不同材料的多个源(110,111)沉积涂层(132)的PVD工艺和设备(120)。 该方法和装置(120)特别用于沉积含有一种或多种蒸气压低于NiAl的元素的β-镍铝化物涂层(132)。 PVD工艺和设备(120)需要将至少两种材料(110,111)进料到涂覆室(122)中并且以与其分离的熔池(114,115)不同的速率蒸发材料(110,111)。 待涂覆的制品(130)悬浮在涂覆室(122)内,并相对于两个熔池(114,115)用支撑装置(118)运输,以便沉积具有受控组合物的涂层(132) 即第一和第二材料(110,111)的混合物。

    Apparatus and method for introducing small amounts of refractory elements into a vapor deposition coating
    2.
    发明授权
    Apparatus and method for introducing small amounts of refractory elements into a vapor deposition coating 有权
    将少量难熔元素引入气相沉积涂层的装置和方法

    公开(公告)号:US06849299B2

    公开(公告)日:2005-02-01

    申请号:US10272256

    申请日:2002-10-16

    IPC分类号: C23C14/16 C23C14/30

    CPC分类号: C23C14/30 C23C14/16 Y02T50/67

    摘要: A method of introducing small amounts of a refractory element into a vapor deposition coating. A second material (30), containing at least two elements which are desired to be deposited as a coating on a base material, has placed over it a first material (20) substantially comprising such two elements and a refractory element. The first material (20) is adapted to permit transport of the at least two elements in the second material (30) through the first material (20) when the first (20) and second (30) material are in a molten state and in touching contact with the other so as to permit evaporation of the two elements and the refractory element from an exposed surface. Heat is supplied to the first (20) and second (30) materials to permit evaporation of the at least two elements of second material (30) and the refractory element in the first material (20), and the resulting vapors are condensed as a deposit on a base material (50). A particular method of heating is further disclosed to assist in maintaining adequate rates of evaporation for the aforesaid method, wherein the supplied heat is supplied to an inner heated area (91) and a surrounding outer heated area (92) and at least a portion of the inner heated area (91) is heated to a greater temperature than the outer heated area (92).

    摘要翻译: 将少量耐火材料引入气相沉积涂层的方法。 包含至少两个期望作为涂层涂覆在基材上的元件的第二材料(30)已经在其上放置了基本上包含这两个元件和难熔元件的第一材料(20)。 当第一(20)和第二(30)材料处于熔融状态时,第一材料(20)适于允许第二材料(30)中的至少两个元件通过第一材料(20) 与另一个接触,以允许两个元件和耐火元件从暴露的表面蒸发。 将热量供应到第一(20)和第二(30)材料以允许第一材料(20)中的第二材料(30)的至少两个元件和耐火元件蒸发,并且所得到的蒸气被冷凝为 沉积在基材(50)上。 进一步公开了一种特定的加热方法,以有助于为上述方法保持足够的蒸发速率,其中供应的热量被供应到内部加热区域(91)和周围的外部加热区域(92)和至少一部分 内加热区域(91)被加热到比外部加热区域(92)更高的温度。

    Method of using a substrate offset to obtain a specific alloy chemistry from a metal alloy EB-PVD coating process
    4.
    发明授权
    Method of using a substrate offset to obtain a specific alloy chemistry from a metal alloy EB-PVD coating process 失效
    使用基板偏移以从金属合金EB-PVD涂覆工艺获得特定合金化学的方法

    公开(公告)号:US06174571B1

    公开(公告)日:2001-01-16

    申请号:US09387373

    申请日:1999-08-31

    IPC分类号: C23C1430

    CPC分类号: C23C14/548 C23C14/24

    摘要: A method of making an evaporated deposit of a material comprising the steps of: (i) positioning at least one test substrate above a vapor source wherein at least a portion of the at least one test substrate is not perpendicularly disposed to vapor source, (ii) heating the vapor source in a vacuum to evaporate the vapor source, (iii) condensing a deposit evaporated from the vapor source on the at least one test substrate such that at least a portion of the deposit is not perpendicularly deposed to the vapor source, (iv) measuring the chemical composition of the deposit at various positions relative to a line normal to the vapor source, (v) repeating steps (i) through (iv) until a deposit having a desired chemical composition is measured, (vi) removing each of the at least one test substrate, (vii) positioning a workpiece above the vapor source at a location corresponding to that of the test substrate upon which a deposit of desired chemical composition is condensed and measured, (viii) heating the vapor source in a vacuum to evaporate the vapor source, and (ix) condensing a deposit evaporated from the vapor source on the workpiece.

    摘要翻译: 一种制造材料的蒸发沉积的方法,包括以下步骤:(i)将至少一个测试衬底定位在蒸气源上方,其中至少一部分测试衬底不垂直于蒸气源放置,(ii )在真空中加热蒸气源以蒸发蒸气源,(iii)将来自蒸气源的沉积物冷凝在至少一个测试基板上,使得沉积物的至少一部分不垂直于蒸气源, (iv)测量相对于垂直于蒸汽源的线的各个位置的沉积物的化学成分,(v)重复步骤(i)至(iv),直到测量具有所需化学成分的沉积物,(vi) 所述至少一个测试基板中的每一个,(vii)将工件放置在所述蒸汽源上方的位置处,所述位置对应于所述测试基板的位置,在所述测试基板上凝结和测量所需化学组成的沉积物, 在真空中加热蒸气源以蒸发蒸气源,和(ix)将从蒸气源蒸发的沉积物冷凝在工件上。

    NANOSTRUCTURE ARRAYS
    6.
    发明申请
    NANOSTRUCTURE ARRAYS 审中-公开
    纳米结构阵列

    公开(公告)号:US20090214851A1

    公开(公告)日:2009-08-27

    申请号:US12352467

    申请日:2009-01-12

    IPC分类号: H01L29/02 B32B3/26

    摘要: A nanostructure array including a nanoporous template and a masking material disposed on the nanoporous template such that a first number of the plurality of nanopores are fully coated while a second number of the plurality of nanopores are not-fully coated by the masking material is provided. The array includes forming nanostructures within the plurality of nanopores that are not-fully coated by the masking material.

    摘要翻译: 提供纳米结构阵列,其包括设置在纳米多孔模板上的纳米多孔模板和掩模材料,使得第一数量的多个纳米孔被完全涂覆,同时第二数量的多个纳米孔未被掩蔽材料完全涂覆。 所述阵列包括在所述多个纳米孔内形成未被所述掩蔽材料完全涂覆的纳米结构。

    Corrosion protective coating for extending the lifetime of water cooled stator bar clips
    7.
    发明授权
    Corrosion protective coating for extending the lifetime of water cooled stator bar clips 有权
    防腐涂层,延长水冷定子线棒的使用寿命

    公开(公告)号:US07129603B2

    公开(公告)日:2006-10-31

    申请号:US11274275

    申请日:2005-11-16

    IPC分类号: H02K9/00

    摘要: A water-cooled stator bar clip for electrical generators and a method for applying a corrosion-resistant protective coating, preferably Sc, Ti, Cr, Zr, Nb, Mo, Hf, Ta, W, Ni, and Al, and their alloys or oxides to existing stator bar end fittings in order to significantly reduce the possibility of leaks through the brazed connections of the copper stator bar end connections. The coatings can be applied locally using various known physical vapor deposition (“PVD”), chemical vapor deposition (“CVD”) or other direct coating techniques known in the art. For example, the coatings can be applied using ion plasma deposition, sputtering or wire arc techniques (all PVD processes) or by using electroplating, high velocity oxygen free (“HVOF”) deposition, DC arc or electroless plating. Preferably, the coatings are applied either to new stator bar clips or to existing clips in the field.

    摘要翻译: 一种用于发电机的水冷式定子棒夹,以及用于施加耐腐蚀保护涂层,优选Sc,Ti,Cr,Zr,Nb,Mo,Hf,Ta,W,Ni和Al及其合金或 氧化物到现有的定子棒端部配件,以便显着地减少通过铜定子棒端部连接的钎焊连接的泄漏的可能性。 涂层可以使用各种已知的物理气相沉积(“PVD”),化学气相沉积(“CVD”)或本领域已知的其它直接涂覆技术进行局部施加。 例如,可以使用离子等离子体沉积,溅射或线弧技术(所有PVD工艺)或通过使用电镀,高速无氧(“HVOF”)沉积,直流电弧或无电镀来施加涂层。 优选地,涂层施加到新的定子杆夹或现场的现有夹子上。

    Application of corrosion protective coating for extending the lifetime of water cooled stator bar clips
    8.
    发明授权
    Application of corrosion protective coating for extending the lifetime of water cooled stator bar clips 有权
    应用防腐涂层,延长水冷定子线棒的使用寿命

    公开(公告)号:US06969932B2

    公开(公告)日:2005-11-29

    申请号:US10622142

    申请日:2003-07-18

    摘要: A water-cooled stator bar clip for electrical generators and a method for applying a corrosion-resistant protective coating, preferably Sc, Ti, Cr, Zr, Nb, Mo, Hf, Ta, W, Ni, and Al, and their alloys or oxides to existing stator bar end fittings in order to significantly reduce the possibility of leaks through the brazed connections of the copper stator bar end connections. The coatings can be applied locally using various known physical vapor deposition (“PVD”), chemical vapor deposition (“CVD”) or other direct coating techniques known in the art. For example, the coatings can be applied using ion plasma deposition, sputtering or wire arc techniques (all PVD processes) or by using electroplating, high velocity oxygen free (“HVOF”) deposition, DC arc or electroless plating. Preferably, the coatings are applied either to new stator bar clips or to existing clips in the field using a known pencil coater technique. After being deposited, the metallic coatings form a protective oxide layers over the existing copper brazed joint after being exposed to a water environment, thereby protecting the chemical and structural integrity of the underlying copper brazed joint.

    摘要翻译: 一种用于发电机的水冷式定子棒夹,以及用于施加耐腐蚀保护涂层,优选Sc,Ti,Cr,Zr,Nb,Mo,Hf,Ta,W,Ni和Al及其合金或 氧化物到现有的定子棒端部配件,以便显着地减少通过铜定子棒端部连接的钎焊连接的泄漏的可能性。 涂层可以使用各种已知的物理气相沉积(“PVD”),化学气相沉积(“CVD”)或本领域已知的其它直接涂覆技术进行局部施加。 例如,可以使用离子等离子体沉积,溅射或线弧技术(所有PVD工艺)或通过使用电镀,高速无氧(“HVOF”)沉积,直流电弧或无电镀来施加涂层。 优选地,使用已知的铅笔涂布机技术将涂层施加到新的定子棒夹或现场的现有夹子。 在沉积后,金属涂层在暴露于水环境之后,在现有的铜钎焊接头上形成保护性氧化物层,从而保护下面的铜钎焊接头的化学和结构完整性。

    Apparatus and method for introducing small amounts of refractory elements into a vapor deposition coating
    9.
    发明授权
    Apparatus and method for introducing small amounts of refractory elements into a vapor deposition coating 失效
    将少量难熔元素引入气相沉积涂层的装置和方法

    公开(公告)号:US06689199B2

    公开(公告)日:2004-02-10

    申请号:US10272236

    申请日:2002-10-16

    IPC分类号: C23C1606

    CPC分类号: C23C14/30 C23C14/16 Y02T50/67

    摘要: A method of introducing small amounts of a refractory element into a vapor deposition coating. A second material (30), containing at least two elements which are desired to be deposited as a coating on a base material, has placed over it a first material (20) substantially comprising such two elements and a refractory element. The first material (20) is adapted to permit transport of the at least two elements in the second material (30) through the first material (20) when the first (20) and second (30) material are in a molten state and in touching contact with the other so as to permit evaporation of the two elements and the refractory element from an exposed surface. Heat is supplied to the first (20) and second (30) materials to permit evaporation of the at least two elements of second material (30) and the refractory element in the first material (20), and the resulting vapors are condensed as a deposit on a base material (50). A particular method of heating is further disclosed to assist in maintaining adequate rates of evaporation for the aforesaid method, wherein the supplied heat is supplied to an inner heated area (91) and a surrounding outer heated area (92) and at least a portion of the inner heated area (91) is heated to a greater temperature than the outer heated area (92).

    摘要翻译: 将少量耐火材料引入气相沉积涂层的方法。 包含至少两个期望作为涂层涂覆在基材上的元件的第二材料(30)已经在其上放置了基本上包含这两个元件和难熔元件的第一材料(20)。 当第一(20)和第二(30)材料处于熔融状态时,第一材料(20)适于允许第二材料(30)中的至少两个元件通过第一材料(20) 与另一个接触,以允许两个元件和耐火元件从暴露的表面蒸发。 将热量供应到第一(20)和第二(30)材料以允许第一材料(20)中的第二材料(30)的至少两个元件和耐火元件蒸发,并且所得到的蒸气被冷凝为 沉积在基材(50)上。 进一步公开了一种特定的加热方法,以有助于为上述方法保持足够的蒸发速率,其中供应的热量被供应到内部加热区域(91)和周围的外部加热区域(92)和至少一部分 内加热区域(91)被加热到比外部加热区域(92)更高的温度。

    Cooling system for cathodic arc cathodes
    10.
    发明授权
    Cooling system for cathodic arc cathodes 失效
    阴极电弧阴极冷却系统

    公开(公告)号:US06409898B1

    公开(公告)日:2002-06-25

    申请号:US09681386

    申请日:2001-03-28

    IPC分类号: C25B1102

    CPC分类号: H01J37/32055 H01J37/32724

    摘要: An apparatus for cathodic arc coating is provided. The apparatus includes: a vacuum chamber which includes an anode; a power supply; and a cathode target connected to the power supply. The cathode target has a channeled back surface for improving heat transfer from the cathode target. In the preferred embodiment, the cathode target also includes a conductor segment connecting the cathode target to the power supply of the cathodic arc coating apparatus for conducting the increased current capacity of the cathode target and a cooling block in contact with the cathode target to further improve the heat transfer from the cathode target.

    摘要翻译: 提供了一种用于阴极电弧涂覆的设备。 该装置包括:真空室,其包括阳极; 电源; 以及连接到电源的阴极靶。 阴极靶具有用于改善从阴极靶的热传递的通道后表面。 在优选实施例中,阴极靶还包括将阴极靶连接到阴极电弧涂覆装置的电源的导体段,用于传导阴极靶的增加的电流容量和与阴极靶接触的冷却块,以进一步改善 从阴极靶传热。