发明授权
- 专利标题： Nanoparticles formed with rigid connector compounds
- 专利标题（中）： 用刚性连接剂化合物形成的纳米颗粒
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申请号： US09361396申请日： 1999-07-26
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公开(公告)号： US06440560B1公开(公告)日： 2002-08-27
- 发明人: Stephen McConnell Gates , Christopher Bruce Murray
- 申请人： Stephen McConnell Gates , Christopher Bruce Murray
- 主分类号： B32B516
- IPC分类号： B32B516
摘要：
The present invention relates to a novel organosilicon particle having the formula SiaObCcHd. The particle may be coated with an organic film, preferably a rigid connector compound. The present invention also provides a method of using the organosilicon particle and/or rigid connector compound in the formation of a low-k dielectric film.
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