发明授权
US06441359B1 Near field optical scanning system employing microfabricated solid immersion lens
失效
采用微制造固体浸没透镜的近场光学扫描系统
- 专利标题： Near field optical scanning system employing microfabricated solid immersion lens
- 专利标题（中）： 采用微制造固体浸没透镜的近场光学扫描系统
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申请号： US09414674申请日： 1999-10-07
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公开(公告)号： US06441359B1公开(公告)日： 2002-08-27
- 发明人: Kenneth B. Cozier , Daniel A. Fletcher , Gordon S. Kino , Calvin F. Quate , Hyongsok T. Soh
- 申请人： Kenneth B. Cozier , Daniel A. Fletcher , Gordon S. Kino , Calvin F. Quate , Hyongsok T. Soh
- 主分类号： G02B702
- IPC分类号： G02B702
摘要：
A solid immersion lens integrated on a flexible support such as a cantilever or membrane is described, together with a method of forming the integrated structure.
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