发明授权
US06444264B2 Method for liquid delivery CVD utilizing alkane and polyamine solvent compositions
有权
使用烷烃和多胺溶剂组合物的液体输送CVD方法
- 专利标题： Method for liquid delivery CVD utilizing alkane and polyamine solvent compositions
- 专利标题（中）： 使用烷烃和多胺溶剂组合物的液体输送CVD方法
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申请号： US09774262申请日： 2001-01-30
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公开(公告)号： US06444264B2公开(公告)日： 2002-09-03
- 发明人: Frank S. Hintermaier , Thomas H. Baum
- 申请人： Frank S. Hintermaier , Thomas H. Baum
- 主分类号： C23C1606
- IPC分类号： C23C1606
摘要：
A solvent composition for liquid delivery chemical vapor deposition of metal organic precursors, to form metal-containing films such as SrBi2Ta2O9 (SBT) films for memory devices. An SBT film may be formed using precursors such as Sr(thd)2(tetraglyme), Ta(OiPr)4(thd) and Bi(thd)3 which are dissolved in a solvent medium comprising one or more alkanes. Specific alkane solvent compositions may advantageously used for MOCVD of metal organic compound(s) such as &bgr;-diketonate compounds or complexes, compound(s) including alkoxide ligands, and compound(s) including alkyl and/or aryl groups at their outer (molecular) surface, or compound(s) including other ligand coordination species and specific metal constituents.