发明授权
- 专利标题: Retrograde well structure for a CMOS imager
- 专利标题(中): CMOS成像器逆行井结构
-
申请号: US09645582申请日: 2000-08-25
-
公开(公告)号: US06445014B1公开(公告)日: 2002-09-03
- 发明人: Howard E. Rhodes , Mark Durcan
- 申请人: Howard E. Rhodes , Mark Durcan
- 主分类号: H01L31062
- IPC分类号: H01L31062
摘要:
A retrograde and periphery well structure for a CMOS imager is disclosed which improves the quantum efficiency and signal-to-noise ratio of the photosensing portion imager. The retrograde well comprises a doped region with a vertically graded dopant concentration that is lowest at the substrate surface, and highest at the bottom of the well. A single retrograde well may have a single pixel sensor cell, multiple pixel sensor cells, or even an entire array of pixel sensor cells formed therein. The highly concentrated region at the bottom of the retrograde well repels signal carriers from the photosensor so that they are not lost to the substrate, and prevents noise carriers from the substrate from diffusing up into the photosensor. The periphery well contains peripheral logic circuitry for the imager. By providing retrograde and peripheral wells, circuitry in each can be optimized. Also disclosed are methods for forming the retrograde and peripheral well.
信息查询