发明授权
- 专利标题: Filters employing porous strongly acidic polymers
- 专利标题(中): 使用多孔强酸性聚合物的过滤器
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申请号: US09378180申请日: 1999-08-20
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公开(公告)号: US06447584B1公开(公告)日: 2002-09-10
- 发明人: Oleg Kishkovich , Robert W. Rezuke , Devon Kinkhead
- 申请人: Oleg Kishkovich , Robert W. Rezuke , Devon Kinkhead
- 主分类号: B01D5302
- IPC分类号: B01D5302
摘要:
A clean, high efficiency, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional side groups. The non-woven filter is used to remove molecular bases, including ammonia, organic amines, inides, aminoalcohols, alcoholoamines from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality.
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