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公开(公告)号:US07022164B2
公开(公告)日:2006-04-04
申请号:US10647656
申请日:2003-08-25
申请人: Oleg Kishkovich , Robert W. Rezuke , Devon Kinkead
发明人: Oleg Kishkovich , Robert W. Rezuke , Devon Kinkead
CPC分类号: B01J20/28004 , B01D53/02 , B01D2253/102 , B01D2253/202 , B01D2253/25 , B01D2253/306 , B01D2253/308 , B01D2253/34 , B01D2257/40 , B01D2257/406 , B01D2258/0216 , B01D2259/4146 , B01D2259/4148 , B01J20/26 , B01J20/28011 , B01J20/28023 , B01J20/28026 , B01J20/28028 , B01J20/2803 , B01J20/28033 , B01J20/28057 , B01J20/28078 , B01J20/2808 , B01J20/28083 , B01J20/3202 , B33Y80/00 , Y10S55/05
摘要: A clean, high efficiency, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional side groups. The non-woven filter is used to remove molecular bases, including ammonia, organic amines, inides, aminoalcohols, alcoholoamines from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality.
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公开(公告)号:US06447584B1
公开(公告)日:2002-09-10
申请号:US09378180
申请日:1999-08-20
IPC分类号: B01D5302
CPC分类号: B01J20/28004 , B01D53/02 , B01D2253/102 , B01D2253/202 , B01D2253/25 , B01D2253/306 , B01D2253/308 , B01D2253/34 , B01D2257/40 , B01D2257/406 , B01D2258/0216 , B01D2259/4146 , B01D2259/4148 , B01J20/26 , B01J20/28011 , B01J20/28023 , B01J20/28026 , B01J20/28028 , B01J20/2803 , B01J20/28033 , B01J20/28057 , B01J20/28078 , B01J20/2808 , B01J20/28083 , B01J20/3202 , B33Y80/00 , Y10S55/05
摘要: A clean, high efficiency, low pressure drop, adsorptive filter material that is porous and includes an acidic functional group. The filter can include, for example, a non-woven filter composite has a porous sulfonated divinyl benzene styrene copolymer beads having sulfonic acid functional side groups. The non-woven filter is used to remove molecular bases, including ammonia, organic amines, inides, aminoalcohols, alcoholoamines from the atmosphere used in semiconductor fabrication and other processes that require uncontaminated gaseous environments of high quality.
摘要翻译: 清洁,高效,低压降,多孔的吸附性过滤材料,包括酸性官能团。 过滤器可以包括例如无纺布过滤器复合材料具有具有磺酸官能侧基的多孔磺化二乙烯基苯苯乙烯共聚物珠。 无纺布过滤器用于从半导体制造中使用的大气中除去分子基团,包括氨,有机胺,内酰胺,氨基醇,烷氧基胺和需要高质量的未污染气体环境的其它方法。
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公开(公告)号:US5626820A
公开(公告)日:1997-05-06
申请号:US161931
申请日:1993-12-02
IPC分类号: A61L9/04 , A62B23/02 , B01D39/08 , B01D46/12 , B01D53/46 , B32B5/26 , F24F3/16 , A62B7/08 , B01D46/00 , B05B15/12
CPC分类号: A61L9/046 , A62B23/025 , B01D39/08 , B01D39/1623 , B01D46/12 , B01D53/46 , B32B5/26 , F24F3/161 , B01D2239/0407 , B01D2239/0464 , B01D2239/065 , B01D2239/0695
摘要: The invention features a clean room and a chemical air filter suitable for use in the air handling system of the clean room directly upstream of high-efficiency particulate air (HEPA) filters. The chemical filter is of the pleated filter type comprising an air permeable, relatively thick web of non-woven fibrous carrier material of pleated form. The web includes a matrix formed of a large multiplicity of synthetic fibers and is characterized in that activated carbon particles are distributed throughout the web, bound in the interstices of the matrix in a manner preventing loss to the air of particles in quantity substantially detrimental to the performance of the HEPA filter. The activated carbon particles are of the type selected to remove the predetermined gas-phase contaminant from the air from the source. The invention also features a non-off gassing filter casing that may easily be installed into existing clean room air handling systems.
摘要翻译: 本发明具有洁净室和适用于直接在高效颗粒空气(HEPA))过滤器上游的洁净室的空气处理系统中的化学空气过滤器。 化学过滤器是褶状过滤器型,包括透气的,相对较厚的褶皱形式的非织造纤维载体材料网。 纤维网包括由大量合成纤维形成的基质,其特征在于活性炭颗粒分布在整个幅材上,以基质的空隙结合在一起,以防止对空气中的空气的损失基本上不利于 HEPA过滤器的性能。 活性炭颗粒是选自从来自空气的预定气相污染物的类型。 本发明还具有可以容易地安装到现有洁净室空气处理系统中的非关闭放气过滤器壳体。
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公开(公告)号:US5582865A
公开(公告)日:1996-12-10
申请号:US180529
申请日:1994-01-12
申请人: Robert W. Rezuke , Devon A. Kinkead
发明人: Robert W. Rezuke , Devon A. Kinkead
IPC分类号: A61L9/04 , A62B23/02 , B01D39/08 , B01D46/12 , B01D53/46 , B32B5/26 , F24F3/16 , B05D1/12 , B05D1/24 , B05D1/40 , B05D5/00
CPC分类号: B01D39/1623 , A61L9/046 , A62B23/025 , B01D39/08 , B01D46/12 , B01D53/46 , B01J20/28028 , B32B5/26 , F24F3/161 , B01D2239/0407 , B01D2239/0464 , B01D2239/065 , B01D2239/0695
摘要: A method of making a high efficiency, low pressure drop, adsorptive, non-woven filter composite is disclosed, comprising a high surface area chemically impregnated adsorbent, and a non-woven carrier material; and a method for forming said composite comprising dry application of the chemically impregnated adsorbent to the non-woven carrier material which is then heated and calendared with or without a cover sheet.
摘要翻译: 公开了一种制备高效低压降吸附性非织造过滤复合材料的方法,其包括高表面积化学浸渍的吸附剂和非织造载体材料; 以及用于形成所述复合材料的方法,其包括将所述化学浸渍的吸附剂干燥施加到所述无纺布载体材料上,然后将所述复合载体材料加热并在有或没有覆盖片材的情况下进行压延。
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