发明授权
- 专利标题: Type-1 polysilicon electrostatic discharge transistors
- 专利标题(中): 1型多晶硅静电放电晶体管
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申请号: US09491532申请日: 2000-01-26
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公开(公告)号: US06448593B1公开(公告)日: 2002-09-10
- 发明人: Masaaki Higashitani , Hao Fang
- 申请人: Masaaki Higashitani , Hao Fang
- 主分类号: H01L2902
- IPC分类号: H01L2902
摘要:
The present invention provides a method and apparatus for providing a polysilicon type-1 ESD transistor in a flash memory chip. The method and apparatus include providing a select gate transistor that includes a gate, a floating gate, a medium doped junction, and a source and drain. The method and apparatus further include forming the source and drain by performing a lightly doped drain (LDD) mask and etch, performing a LDD spacer deposition and LDD spacer etch, and performing a N+ implant mask and a N+ implant.
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