- 专利标题: CMOS/MEMS integrated ink jet print head with heater elements formed during CMOS processing and method of forming same
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申请号: US09792188申请日: 2001-02-22
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公开(公告)号: US06450619B1公开(公告)日: 2002-09-17
- 发明人: Constantine N. Anagnostopoulos , John A. Lebens , Gilbert A. Hawkins , David P. Trauernicht , James M. Chwalek , Christopher N. Delametter
- 申请人: Constantine N. Anagnostopoulos , John A. Lebens , Gilbert A. Hawkins , David P. Trauernicht , James M. Chwalek , Christopher N. Delametter
- 主分类号: B41S205
- IPC分类号: B41S205
摘要:
A continuous ink jet print head is formed of a silicon substrate that includes integrated circuits formed therein for controlling operation of the print head. An insulating layer or layers overlies the silicon substrate and has a series or an array of nozzle openings or bores formed therein along the length of the substrate and each nozzle opening is formed in a recess in the insulating layer or layers by a material depletion process such as etching. The process of etching defines the nozzle openings at locations where heater elements are formed in the insulating layer or layers during a conventional CMOS processing of the integrated circuits. The print head structure thereby provides for minimal post processing of the print head after the completion of the CMOS processing.
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