发明授权
US06451490B1 Method to overcome image shortening by use of sub-resolution reticle features
失效
通过使用分辨率分辨率特征克服图像缩短的方法
- 专利标题： Method to overcome image shortening by use of sub-resolution reticle features
- 专利标题（中）： 通过使用分辨率分辨率特征克服图像缩短的方法
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申请号： US09709091申请日： 2000-11-08
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公开(公告)号： US06451490B1公开(公告)日： 2002-09-17
- 发明人: William H. Advocate , Scott J. Bukofsky , Christopher Adam Feild , Donald J. Samuels
- 申请人： William H. Advocate , Scott J. Bukofsky , Christopher Adam Feild , Donald J. Samuels
- 主分类号： G03F900
- IPC分类号： G03F900
摘要：
Image shortening in a photolithographic process is substantially reduced by using sub-resolution reticle features to alter the aerial image in the shortened regions. The use of such sub-resolution reticle features is simple to implement in a design system, and allows for increased feature aspect ratio as well as overlap to other critical features.
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