发明授权
- 专利标题: Electronic device including langasite structure compound and method for making such devices
- 专利标题(中): 包括硅藻土结构化合物的电子器件及其制造方法
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申请号: US09848715申请日: 2001-05-03
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公开(公告)号: US06455986B2公开(公告)日: 2002-09-24
- 发明人: Bruce H. T. Chai , Mitch M. C. Chou , Haihong Qiu , Shen Jen
- 申请人: Bruce H. T. Chai , Mitch M. C. Chou , Haihong Qiu , Shen Jen
- 主分类号: H01L4104
- IPC分类号: H01L4104
摘要:
An electronic device includes a piezoelectric layer formed of an ordered Langasite structure compound having the formula A3BC3D2E14 wherein A is strontium, B is niobium, C is gallium, D is silicon, and E is oxygen. At least one electrode is connected to the piezoelectric layer and may be configured to define a device, such as a SAW resonator or filter, or a BAW resonator or filter. The ordered Langasite structure compound may have a substantially perfectly ordered structure.