An improved method of fabricating nanometer-scale devices is provided, wherein the improvement comprises: (1) employing materials for a first electrode, a first insulating layer, if present, a molecular switch layer, a second insulating layer, if present, and a second electrode that permit photopatterning of the second electrode; and (2) photopatterning at least the second electrode without adversely affecting the molecular switch layer. The improved method incorporates known techniques on a smaller scale than previously done to provide a means to move away from shadow mask electrodes (many micrometers wide), presently used in nanometer-scale devices, and move to nanometer dimensions. The improved method further facilitates integration of nanometer-scale devices to larger silicon-based technology.