发明授权
- 专利标题: Evaporation source material supplier
- 专利标题(中): 蒸发源材料供应商
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申请号: US09710713申请日: 2000-11-10
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公开(公告)号: US06467427B1公开(公告)日: 2002-10-22
- 发明人: Kuang-Chung Peng
- 申请人: Kuang-Chung Peng
- 主分类号: H01L21285
- IPC分类号: H01L21285
摘要:
A supplier of evaporation source material. The evaporation system that uses the source material supplier includes an evaporation chamber and a vacuum extraction system. The vacuum extraction system is connected to the evaporation chamber. The source material supplier, a movable evaporation boat and a wafer holder are housed inside the evaporation chamber. The source material supplier is on one of the sidewalls inside the evaporation chamber. The wafer holder is in the upper portion of the evaporation chamber. The wafer holder is responsible for holding a wafer requiring thin film deposition. The movable evaporation boat is in the lower portion of the evaporation chamber for holding evaporation source material. The source material supplier includes a revolving cassette wheel and a crucible under the cassette wheel. The revolving cassette wheel is partition by separating plates and an outer casing into a plurality of capsules with each capsule capable of holding a fixed amount of evaporation source material. When the cassette wheel rotates, the lowest capsule can deliver a lump of evaporation source material onto the crucible via a drop hole in the outer casing.
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